{"id":21340,"date":"2014-07-09T12:00:00","date_gmt":"2014-07-09T03:00:00","guid":{"rendered":"https:\/\/www.tsukuba-sci.com\/?p=21340"},"modified":"2014-07-03T15:57:12","modified_gmt":"2014-07-03T06:57:12","slug":"tkbscinews-973","status":"publish","type":"post","link":"https:\/\/www.tsukuba-sci.com\/cms\/?p=21340","title":{"rendered":"\u5927\u6c17\u4e2d\u3067\u91d1\u5c5e\u540c\u58eb\u3092\u5e38\u6e29\u63a5\u5408\u3059\u308b\u65b0\u6280\u8853\u958b\u767a<br>\u2015\u71b1\u30fb\u5727\u529b\u306b\u3088\u308b\u6b6a\u307f\u9632\u304eMEMS\u3078\u306e\u5fdc\u7528\u76ee\u6307\u3059<br>\uff1a\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240"},"content":{"rendered":"<div>\n<p>\u3000\uff08\u72ec\uff09\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\u306f6\u670826\u65e5\u3001\u5e38\u6e29\u306e\u5927\u6c17\u4e2d\u3067\u91d1\u5c5e\u540c\u58eb\u3092\u63a5\u5408\u3059\u308b\u6280\u8853\u3092\u958b\u767a\u3057\u305f\u3068\u767a\u8868\u3057\u305f\u3002\u5fae\u5c0f\u306a\u6a5f\u68b0\u53ef\u52d5\u90e8\u3068\u96c6\u7a4d\u56de\u8def\uff08IC\uff09\u3092\u7d44\u307f\u5408\u308f\u305b\u305f\u5fae\u5c0f\u96fb\u5b50\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0\uff08MEMS\uff09\u4f5c\u308a\u306b\u5fdc\u7528\u3059\u308c\u3070\u3001\u5f93\u6765\u306e\u52a0\u71b1\u5727\u7740\u6cd5\u3067\u554f\u984c\u3068\u3055\u308c\u305f\u71b1\u3084\u5727\u529b\u306b\u3088\u308b\u88fd\u54c1\u306e\u6b6a\u307f\u3092\u9632\u3052\u308b\u307b\u304b\u3001\u5927\u898f\u6a21\u306a\u771f\u7a7a\u88c5\u7f6e\u3082\u4e0d\u8981\u306b\u306a\u308b\u3002\u4eca\u5f8c\u3001\u65b0\u6280\u8853\u306e\u9069\u7528\u7bc4\u56f2\u306b\u62e1\u5927\u306b\u53d6\u308a\u7d44\u307f\u3001\u4f01\u696d\u3068\u306e\u9023\u643a\u3082\u9032\u3081\u3066\u5b9f\u7528\u5316\u306b\u3064\u306a\u3052\u308b\u3002<\/p>\n<p>&nbsp;<\/p>\n<p>\u25a0\u5927\u898f\u6a21\u306a\u771f\u7a7a\u88c5\u7f6e\u306f\u4e0d\u8981\u306b<\/p>\n<p>&nbsp;<\/p>\n<p>\u3000\u540c\u7814\u7a76\u6240\u30fb\u96c6\u7a4d\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u30bb\u30f3\u30bf\u30fc\u306e\u5009\u5cf6\u96c4\u4e00\u7814\u7a76\u54e1\u3001\u9ad8\u6728\u79c0\u6a39\u7814\u7a76\u30c1\u30fc\u30e0\u9577\u304c\u91d1\u306e\u8868\u9762\u3092\u6ed1\u3089\u304b\u306b\u3059\u308b\u6280\u8853\u3092\u958b\u767a\u3002\u91d1\u306e\u8868\u9762\u7c97\u3055\u3092\u5f93\u6765\u306e\u91d1\u30e1\u30c3\u30ad\u306e\u7d0420\u5206\u306e1\u306b\u3059\u308b\u3053\u3068\u3067\u3001\u5927\u6c17\u4e2d\u3067\u8cbc\u308a\u5408\u308f\u305b\u308b\u3060\u3051\u3067\u91d1\u540c\u58eb\u304c\u63a5\u5408\u3067\u304d\u308b\u3088\u3046\u306b\u3057\u305f\u3002<\/p>\n<p class=\"margintop1em\">\u3000\u65b0\u6280\u8853\u3067\u306f\u3001\u307e\u305a\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u8868\u9762\u306b50nm\uff08\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30011nm\u306f10\u5104\u5206\u306e1m\uff09\u306e\u8584\u3044\u30c1\u30bf\u30f3\u8584\u819c\u3092\u5f62\u6210\u3001\u305d\u306e\u4e0a\u306b\u91d1\u306e\u539a\u819c\u3092\u63a5\u5408\u90e8\u306e\u30d1\u30bf\u30fc\u30f3\u306b\u5408\u308f\u305b\u3066\u30e1\u30c3\u30ad\u3059\u308b\u3002\u6b21\u3044\u3067MEMS\u306e\u5fae\u7d30\u306a\u53ef\u52d5\u90e8\u3092\u4fdd\u8b77\u3059\u308b\u305f\u3081\u306e\u5c01\u6b62\u57fa\u677f\u306b\u3001\u91d1\u306e\u539a\u819c\u30d1\u30bf\u30fc\u30f3\u3092\u52a0\u71b1\u5727\u7740\u3002\u305d\u306e\u5f8c\u306b\u30c1\u30bf\u30f3\u8584\u819c\u3092\u85ac\u54c1\u3067\u6eb6\u304b\u3059\u3068\u3001\u8868\u9762\u304c\u6975\u3081\u3066\u6ed1\u3089\u304b\u306a\u91d1\u306e\u539a\u819c\u30d1\u30bf\u30fc\u30f3\u304c\u5c01\u6b62\u57fa\u677f\u306b\u8ee2\u5199\u3055\u308c\u308b\u3002<\/p>\n<p class=\"margintop1em\">\u3000\u539a\u819c\u30d1\u30bf\u30fc\u30f3\u3068\u540c\u3058\u5f62\u72b6\u306e\u91d1\u306e\u8584\u819c\u3092MEMS\u57fa\u677f\u306b\u4ed8\u3051\u3001\u5c01\u6b62\u57fa\u677f\u3068\u8cbc\u308a\u5408\u308f\u305b\u308b\u3002\u91d1\u306e\u8584\u819c\u306f\u30b9\u30d1\u30c3\u30bf\u88fd\u819c\u6cd5\u3067\u4f5c\u3089\u308c\u5341\u5206\u306b\u8584\u3044\u305f\u3081\u3001\u6ed1\u3089\u304b\u306a\u8868\u9762\u72b6\u614b\u3092\u6301\u3064\u3002\u305d\u306e\u305f\u3081\u52a0\u71b1\u3057\u306a\u304f\u3066\u3082\u91d1\u306e\u8584\u819c\u306f\u5e38\u6e29\u3067\u3082\u539a\u819c\u3068\u5f37\u56fa\u306b\u63a5\u5408\u3001MEMS\u57fa\u677f\u306e\u5fae\u7d30\u306a\u53ef\u52d5\u90e8\u304c\u5bc6\u5c01\u30fb\u4fdd\u8b77\u3055\u308c\u308b\u4ed5\u7d44\u307f\u3002\u63a5\u5408\u90e8\u306e\u5f37\u5ea6\u3092\u8abf\u3079\u305f\u3068\u3053\u308d\u3001200\u2103\u3067\u52a0\u71b1\u5727\u7740\u3057\u305f\u5834\u5408\u3068\u540c\u7a0b\u5ea6\u3067\u3042\u308b\u3053\u3068\u304c\u78ba\u8a8d\u3067\u304d\u305f\u3002<\/p>\n<p class=\"margintop1em\">\u3000MEMS\u306f\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5\u30fc\u3084\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u7528\u30df\u30e9\u30fc\u7d20\u5b50\u306a\u3069\u3001\u3055\u307e\u3056\u307e\u306a\u88fd\u54c1\u306b\u5fdc\u7528\u3055\u308c\u3066\u3044\u308b\u3002\u305f\u3060\u3001\u53ef\u52d5\u90e8\u306e\u4fdd\u8b77\u3084\u6c17\u5bc6\u6027\u306e\u78ba\u4fdd\u3001IC\u3068\u306e\u96fb\u6c17\u7684\u306a\u63a5\u7d9a\u306a\u3069\u3092\u540c\u6642\u306b\u5b9f\u73fe\u3059\u308b\u5c01\u6b62\u5de5\u7a0b\u306b300\u2103\u4ee5\u4e0a\u306e\u9ad8\u6e29\u304c\u5fc5\u8981\u3060\u3063\u305f\u3002\u305d\u306e\u305f\u3081\u5927\u898f\u6a21\u306a\u88c5\u7f6e\u304c\u5fc5\u8981\u3067\u52a0\u71b1\u30fb\u51b7\u5374\u306b\u3082\u6642\u9593\u304c\u304b\u304b\u308b\u306a\u3069\u3001\u30b3\u30b9\u30c8\u9ad8\u306e\u539f\u56e0\u306b\u306a\u3063\u3066\u3044\u305f\u3002\u71b1\u81a8\u5f35\u306e\u5f71\u97ff\u3067\u51b7\u5374\u5f8c\u306b\u88fd\u54c1\u304c\u6b6a\u3080\u306a\u3069\u3001\u9ad8\u4fe1\u983c\u6027\u3092\u7dad\u6301\u3059\u308b\u70b9\u3067\u3082\u96e3\u70b9\u304c\u591a\u304b\u3063\u305f\u3002<\/p>\n<p class=\"margintop1em\">\u3000\u7523\u7dcf\u7814\u306f\u4eca\u5f8c\u3001\u91d1\u306e\u4f7f\u7528\u91cf\u3092\u5c11\u306a\u304f\u3067\u304d\u308b\u3088\u3046\u65b0\u6280\u8853\u306e\u6539\u826f\u3092\u9032\u3081\u3001\u6700\u7d42\u7684\u306b\u306f\u91d1\u3092\u4f7f\u308f\u305a\u306b\u63a5\u5408\u3067\u304d\u308b\u6280\u8853\u306e\u958b\u767a\u3092\u76ee\u6307\u3059\u3002<\/p>\n<p><a href=\"http:\/\/www.aist.go.jp\/aist_j\/press_release\/pr2014\/pr20140626\/pr20140626.html\" target=\"_blank\">\u8a73\u3057\u304f\u306f\u3053\u3061\u3089<\/a><\/p>\n<div class=\"photobox02\" style=\"width: 475px;\">\n<div class=\"photobox-photo-h\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-21354\" src=\"https:\/\/www.tsukuba-sci.com\/cms\/wp-content\/uploads\/2014\/07\/topics140703_001.png\" alt=\"\u56f3\" width=\"475\" height=\"323\" srcset=\"https:\/\/www.tsukuba-sci.com\/cms\/wp-content\/uploads\/2014\/07\/topics140703_001.png 475w, https:\/\/www.tsukuba-sci.com\/cms\/wp-content\/uploads\/2014\/07\/topics140703_001-300x204.png 300w\" sizes=\"auto, (max-width: 475px) 100vw, 475px\" \/><\/div>\n<p>\u5de6\u306f\u3001\u5f93\u6765\u306e\u63a5\u5408\u65b9\u6cd5\u3067\u3001\u53f3\u304c\u4eca\u56de\u958b\u767a\u3057\u305f\u63a5\u5408\u65b9\u6cd5\uff08\u63d0\u4f9b\uff1a\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\uff09<\/p>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u3000\uff08\u72ec\uff09\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\u306f6\u670826\u65e5\u3001\u5e38\u6e29\u306e\u5927\u6c17\u4e2d\u3067\u91d1\u5c5e\u540c\u58eb\u3092\u63a5\u5408\u3059\u308b\u6280\u8853\u3092\u958b\u767a\u3057\u305f\u3068\u767a\u8868\u3057\u305f\u3002\u5fae\u5c0f\u306a\u6a5f\u68b0\u53ef\u52d5\u90e8\u3068\u96c6\u7a4d\u56de\u8def\uff08IC\uff09\u3092\u7d44\u307f\u5408\u308f\u305b\u305f\u5fae\u5c0f\u96fb\u5b50\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0\uff08MEMS\uff09\u4f5c\u308a\u306b\u5fdc\u7528\u3059\u308c\u3070\u3001\u5f93\u6765\u306e\u52a0\u71b1\u5727\u7740\u6cd5\u3067\u554f\u984c\u3068 &hellip; <a href=\"https:\/\/www.tsukuba-sci.com\/cms\/?p=21340\">\u7d9a\u304d\u3092\u8aad\u3080 <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[],"class_list":["post-21340","post","type-post","status-publish","format-standard","hentry","category-topics"],"_links":{"self":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/posts\/21340","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=21340"}],"version-history":[{"count":1,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/posts\/21340\/revisions"}],"predecessor-version":[{"id":21355,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/posts\/21340\/revisions\/21355"}],"wp:attachment":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=21340"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=21340"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=21340"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}