{"id":13729,"date":"2010-06-30T12:00:00","date_gmt":"2010-06-30T03:00:00","guid":{"rendered":"https:\/\/www.tsukuba-sci.com\/cms\/?p=13729"},"modified":"2010-06-30T12:00:00","modified_gmt":"2010-06-30T03:00:00","slug":"%e6%ac%a1%e4%b8%96%e4%bb%a3lsi%e5%90%91%e3%81%91%e7%ab%8b%e4%bd%93%e5%9e%8b%e3%83%88%e3%83%a9%e3%83%b3%e3%82%b8%e3%82%b9%e3%82%bf%e3%82%92%e8%a9%a6%e4%bd%9c%ef%bc%9a%e7%94%a3%e6%a5%ad%e6%8a%80","status":"publish","type":"post","link":"https:\/\/www.tsukuba-sci.com\/cms\/?p=13729","title":{"rendered":"\u6b21\u4e16\u4ee3LSI\u5411\u3051\u7acb\u4f53\u578b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u8a66\u4f5c<br>\uff1a\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240"},"content":{"rendered":"<p><TABLE border=0 cellSpacing=0 cellPadding=0 width=\"100%\"><TBODY><TR><TD><P>\u3000\uff08\u72ec\uff09\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\u306f6\u670815\u65e5\u30012013\u5e74\u9803\u306b\u5b9f\u7528\u5316\u304c\u898b\u8fbc\u307e\u308c\u308b\u6b21\u306e22nm\uff08\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30011nm\u306f10\u5104\u5206\u306e1m\uff09\u4e16\u4ee3LSI\uff08\u5927\u898f\u6a21\u96c6\u7a4d\u56de\u8def\uff09\u958b\u767a\u306b\u5411\u3051\u3066\u300c\u30d5\u30a3\u30f3FET\uff08\u30d5\u30a3\u30f3\u578b\u30de\u30eb\u30c1\u30b2\u30fc\u30c8\u96fb\u754c\u52b9\u679c\u578b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\uff09\u300d\u3068\u547c\u3070\u308c\u308b\u7acb\u4f53\u578b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u8a66\u4f5c\u306b\u6210\u529f\u3057\u305f\u3068\u767a\u8868\u3057\u305f\u3002CMOS\uff08\u76f8\u88dc\u578b\u91d1\u5c5e\u9178\u5316\u819c\u534a\u5c0e\u4f53\uff09\u306e\u6750\u6599\u3084\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u306a\u3069\u306e\u6539\u5584\u306b\u3088\u308a\u7d20\u5b50\u7279\u6027\uff08\u3057\u304d\u3044\u5024\u96fb\u5727\uff09\u306e\u30d0\u30e9\u30c4\u30ad\u304c\u5927\u5e45\u306b\u6e1b\u5c11\u300122nm\u4e16\u4ee3LSI\u4f5c\u308a\u3067\u306e\u6b69\u7559\u307e\u308a\u5411\u4e0a\u304c\u671f\u5f85\u3055\u308c\u308b\u3002<br \/>\u3000\u3053\u308c\u307e\u3067\u3001\u30b7\u30ea\u30b3\u30f3LSI\u306e\u9ad8\u6027\u80fd\u30fb\u9ad8\u96c6\u7a4d\u5316\u306f\u3001\u6700\u5c0f\u69cb\u6210\u5358\u4f4d\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u5fae\u7d30\u5316\u3067\u9032\u3093\u3067\u304d\u305f\u304c\u3001\u6b21\u306e22nm\u4e16\u4ee3\u3067\u306f\u305d\u306e\u5bf8\u6cd5\u306e\u5c0f\u3055\u3055\u304b\u3089\u6765\u308b\u7d20\u5b50\u9593\u306e\u7279\u6027\u306e\u30d0\u30e9\u30c4\u30ad\u306b\u3088\u308b\u88fd\u54c1\u306e\u6b69\u7559\u307e\u308a\u4f4e\u4e0b\u304c\u5fc3\u914d\u3055\u308c\u308b\u3002<br \/>\u3000\u540c\u7814\u7a76\u6240\u306f\u3001\u7279\u6027\u306e\u30d0\u30e9\u30c4\u30ad\u4f4e\u6e1b\u3092\u76ee\u6307\u3057\u306622nm\u4e16\u4ee3\u306e\u30d5\u30a3\u30f3FET\u4f5c\u308a\u306e\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u3092\u65b0\u305f\u306b\u958b\u767a\u3001\u305d\u306e\u624b\u6cd5\u3092\u7528\u3044\u3066\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u8a66\u4f5c\u3057\u305f\u3002<br \/>\u3000\u307e\u305a\u3001\u30c1\u30e3\u30cd\u30eb\u3068\u547c\u3070\u308c\u308b\u90e8\u5206\u306e\u6750\u6599\u306b\u4e0d\u7d14\u7269\u7121\u6dfb\u52a0\u306e\u7d14\u30b7\u30ea\u30b3\u30f3\u3092\u63a1\u7528\u3001\u4e0d\u7d14\u7269\u306b\u3088\u308b\u30d0\u30e9\u30c4\u30ad\u3092\u5b8c\u5168\u306b\u9664\u53bb\u3057\u305f\u3002\u307e\u305f\u3001\u30b7\u30ea\u30b3\u30f3\u306e\u7d50\u6676\u9762\u306b\u3088\u3063\u3066\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u304c\u7570\u306a\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\uff08\u9ad8\u7570\u65b9\u6027\u30a6\u30a8\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\uff09\u3092\u5c0e\u5165\u3001\u30c1\u30e3\u30cd\u30eb\u306e\u5074\u58c1\u304c\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306b\u5f62\u6210\u3067\u304d\u308b\u3088\u3046\u306b\u306a\u3063\u305f\u3002\u3053\u308c\u3067\u30c1\u30e3\u30cd\u30eb\u306e\u539a\u3055\u306e\u30d0\u30e9\u30c4\u30ad\u304c\u6291\u3048\u3089\u308c\u308b\u3070\u304b\u308a\u3067\u306a\u304f\u3001\u30c1\u30e3\u30cd\u30eb\u5074\u58c1\u9762\u306b\u51f9\u51f8\u304c\u751f\u3058\u306a\u3044\u305f\u3081\u3001\u3053\u306e\u58c1\u306e\u4e0a\u306b\u5806\u7a4d\u3055\u308c\u308b\u30b2\u30fc\u30c8\u91d1\u5c5e\u3082\u539a\u3055\u4e00\u69d8\u306b\u5806\u7a4d\u3055\u308c\u3001\u91d1\u5c5e\u30b2\u30fc\u30c8\u304b\u3089\u96fb\u5b50\u3092\u53d6\u308a\u51fa\u3059\u6700\u5c0f\u30a8\u30cd\u30eb\u30ae\u30fc\uff08\u4ed5\u4e8b\u95a2\u6570\uff09\u306e\u30d0\u30e9\u30c4\u30ad\u3082\u6975\u9650\u307e\u3067\u4f4e\u6e1b\u3067\u304d\u305f\u3002<br \/>\u3000\u30b7\u30b9\u30c6\u30e0LSI\u3084CMOS\u3067\u306f\u3001SRAM\uff08\u8a18\u61b6\u4fdd\u6301\u52d5\u4f5c\u4e0d\u8981\u306e\u968f\u6642\u66f8\u304d\u8fbc\u307f\u8aad\u307f\u51fa\u3057\u30e1\u30e2\u30ea\u30fc\uff09\u3067\u6700\u5c0f\u5bf8\u6cd5\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u591a\u7528\u3059\u308b\u3053\u3068\u304b\u3089\u3001\u7279\u6027\u30d0\u30e9\u30c4\u30ad\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\u3002\u540c\u7814\u7a76\u6240\u306f\u3001\u4eca\u5f8c\u3001\u3053\u306e\u30d5\u30a3\u30f3FET\u3067SRAM\u3092\u5b9f\u969b\u306b\u4f5c\u88fd\u3057\u3001\u6b69\u7559\u307e\u308a\u5411\u4e0a\u306e\u5b9f\u8a3c\u3092\u884c\u3046\u3002<\/P><P><A href=\"http:\/\/www.aist.go.jp\/aist_j\/press_release\/pr2010\/pr20100615\/pr20100615.html\" target=_blank>\u8a73\u3057\u304f\u306f\u3053\u3061\u3089<\/A><\/P><\/TD><TD><TABLE border=0 cellSpacing=0 cellPadding=3 width=190><TBODY><TR><TD><IMG src=\"\/cms\/wp-content\/uploads\/images\/fig1_002.jpg\"><\/TD><\/TR><TR><\/p>\n<td class=\"td-smallfont-lineheight\">\u8a66\u4f5c\u3057\u305f\u65b0\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u69cb\u9020\uff08\u63d0\u4f9b\uff1a\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\uff09<\/TD><\/TR><\/TBODY><\/TABLE><\/TD><\/TR><\/TBODY><\/TABLE><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3000\uff08\u72ec\uff09\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\u306f6\u670815\u65e5\u30012013\u5e74\u9803\u306b\u5b9f\u7528\u5316\u304c\u898b\u8fbc\u307e\u308c\u308b\u6b21\u306e22nm\uff08\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30011nm\u306f10\u5104\u5206\u306e1m\uff09\u4e16\u4ee3LSI\uff08\u5927\u898f\u6a21\u96c6\u7a4d\u56de\u8def\uff09\u958b\u767a\u306b\u5411\u3051\u3066\u300c\u30d5\u30a3\u30f3FET\uff08\u30d5\u30a3\u30f3\u578b\u30de\u30eb\u30c1\u30b2\u30fc\u30c8\u96fb\u754c\u52b9\u679c\u578b\u30c8\u30e9\u30f3\u30b8\u30b9 &hellip; <a href=\"https:\/\/www.tsukuba-sci.com\/cms\/?p=13729\">\u7d9a\u304d\u3092\u8aad\u3080 <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[],"class_list":["post-13729","post","type-post","status-publish","format-standard","hentry","category-topics"],"_links":{"self":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/posts\/13729","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=13729"}],"version-history":[{"count":0,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=\/wp\/v2\/posts\/13729\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=13729"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=13729"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.tsukuba-sci.com\/cms\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=13729"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}